Mixed Oxide Sputtering Targets

Mixed oxide Introduction

Mixed oxide compounds are sometimes treated as salts, as it looks like a metal ion with a oxyacid group, such as LaCrO3. For mixed oxide sputter targets, they are in most of cases produced by solid synthesizing first and then hot press it under high enough temperature. This double sintering process shall conduct the best trial to obtain single phase material. Thus, the cost is much higher than normal oxide sputter targets, and requires lot of experience to make a single phase sputter target with enough density. 

Our Sputter target product line

QSAM is a professional supplier of custom manufactured R&D equipments and materials. Our batch hot pressors could produce specified composition material in a relatively short time with competative price. Disc sputter targets of mixed oxides could be made in a range of 1" ~ 12" diameter, determined by the property of material. Most of the regular made products is pure single phase material.

List of our regular sputter targets

*Other composition could be available, contact sales@qsadvancedmaterials.com for more information.

Product	Purity	Catalog No.	Typical Lead Time
AgNbO3 Sputter Target	>99.5%	DPMO201ST	4 Weeks
Ba2Bi1.05NbO6 Sputter Target	>99.5%	DPMO202ST	4 Weeks
Ba2Bi1.05TaO6 Sputter Target	>99.5%	DPMO203ST	4 Weeks
BaFeO3 Sputter Target	>99.5%	DPMO204ST	4 Weeks
Barium Strontium Niobate (Ba0.25Sr0.75Nb2O6) Sputter Target	99.9%	DPOX56FST	4 Weeks
Barium Strontium Titanate (Ba0.5Sr0.5TiO3) Sputtering Targets	99.9%	DPOX56ST	3 Weeks
Barium Titanate (BaTiO3) Sputtering Targets	99.9%	DPOX56ST	4 Weeks
Barium Zirconate (BaZrO3) Sputtering Targets	99.9%	DPOX56ST	3 Weeks
BaZr0.2Ti0.8O3 Sputter Target	>99.5%	DPMO205ST	4 Weeks
Bi1-xLaxFeO3 Sputter Target	>99.5%	DPMO206ST	4 Weeks
BiFeO3 Sputter Target	>99.5%	DPMO207ST	4 Weeks
Bismuth Ferrite (BiFeO3) Sputtering Targets	99.9%	DPOX83ST	3 Weeks
Bismuth Ferrite (Garnet, Bi3Fe5O12) Sputtering Targets	99.9%	DPOX83ST	4 Weeks
Bismuth Titanate (Bi4Ti3O12) Sputtering Targets	99.9%	DPOX83ST	3 Weeks
CaCuO2 Sputter Target	>99.5%	DPMO208ST	3 Weeks
Calcium Ruthenate (CaRuO3) Sputter Targets	99.9%	DPATOST	4 Weeks
Calcium Zirconate (CaZrO3) Sputter Target	99.9%	DPOX20ZST	4 Weeks
DyScO3 Sputter Target	>99.5%	DPMO209ST	3 Weeks
ErMnO3 Sputter Target	>99.5%	DPMO210ST	3 Weeks
Germanium (Ge) Sputtering Targets	>99.5%	DPMO211ST	3 Weeks
HoMnO3 Sputter Target	>99.5%	DPMO212ST	3 Weeks
Lithium Manganate (LiMn2O4) Sputtering Targets	99.9%	DPMO325ST	4 weeks
Lithium Tantalate (LiTaO3) Sputtering Targets	99.9%	DPMO373ST	4 weeks
Lanthanum Aluminate (LaAlO3) Sputtering Targets	99.9%	DPOX57ST	3 Weeks
Lanthanum Aluminate (LaAlO3) Sputtering Targets	99.9%	DPOX57ST	3 Weeks
Lanthanum chromate (LaCrO3) Sputter Target	99.9%	DPOX57CST	4 Weeks
Lanthanum Manganate (LaMnO3) Sputtering Targets	99.9%	DPOX57ST	3 Weeks
Lanthanum Manganate (LaMnO3) Sputtering Targets	99.9%	DPOX57ST	3 Weeks
Lanthanum Strontium Vanadate (LaSrVO3) Sputtering Targets	99.9%	DP-LSVO-ST	4 weeks
Lanthanum Strontium Manganate (La0.7Sr0.3MnO3) Sputter Target	99.9%	DPOX58ZST	4 Weeks
Lanthanum Titanate (LaTiO3) Sputtering Targets	99.9%	DPOX57ST	4 Weeks
Lanthanum Titanate (LaTiO3) Sputtering Targets	99.9%	DPOX57ST	4 Weeks
Lead Titanate (PbTiO3) Sputtering Targets	99.9%	DPOX82ST	4 Weeks
Lead Zirconate (PbZrO3) Sputtering Targets	99.9%	DPOX82ST	4 Weeks
Lead Zirconium Titanate (PbZr0.52Ti0.48O3) Sputtering Targets	99.9%	DPOX82ST	4 Weeks
Lithium Iron Phosphate (LiFePO4, LFP) Sputter Targets	99.9%	DPLFPST	4 Weeks
Lithium Niobate (LiNbO3) Sputtering Targets	99.9%	DPOX3ST	4 Weeks
Lithium Phosphate (Li3PO4) Sputtering Targets	99.9% ~ 99.95%	DPOX3ST	4 Weeks
Nickel Chromium Oxide (Ni0.5Co0.5O) Sputter Target	99.9%	DPOX2728ST	4 Weeks
Nickel Ferrite (NiFe2O4) Sputter Target	99.9%	DPFEOX28ST	4 Weeks
PbZr1-XTiXO3 Sputter Target	>99.5%	DPMO214ST	3 Weeks
Potassium Niobate (KNbO3) Sputter Target	99.9%	DPOX19NBST	4 Weeks
Potassium Tantalate (KTaO3) Sputter Target	99.9%	DPOX19TAST	4 Weeks
Sr3Al2O6 Sputter Target	99.9%	DPSAOST	4 Weeks
SrCoO2.5 Sputter Target	99.9%	DPMO217ST	4 Weeks
SrCuO2 Sputter Target	99.9%	DPMO218ST	4 Weeks
SrInO3 Sputter Target	99.9%	DPMO219ST	4 Weeks
SrMnO3 Sputter Target	99.9%	DPMO221ST	4 Weeks
Strontium Niobate (SrNbO3) Sputtering Targets	99.9%	DPOXSNOST	4 Weeks
Strontium Ruthenate (SrRuO3) Sputtering Targets	99.9%	DPOX38ST	4 Weeks
Strontium Titanate (SrTiO3) Sputtering Targets	99.9%	DPOX38ST	4 Weeks
Thulium Iron Garnet (Tm3Fe5O12) Sputtering Targets	99.9%	DP-TIG-ST	4 weeks
Strontium Zirconate (SrZrO3) Sputtering Targets	99.9%	DPOX38ST	4 Weeks
Yttrium iron garnet (YIG Y3Fe5O12) Sputter Target	99.9%	DPYIGST	4 Weeks
Ytterbium Titanate (Yb2TiO5) Sputtering Targets	99.9%	DPMO7022ST	4 weeks

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